In order to improve the characteristics of a conventional moving coil permanent magnet linear motor (MCPMLM), such as weak points on export force, response time, response speed, we studied a permanent magnet (PM) structure that is a key component of MCPMLM. Different magnetization techniques of single PM and different array structures of multiple PMs are compared, and a new MCPMLM magnetized along the external field force lines using eight pieces of a tegular Halbach magnet array with air gaps is proposed as well. The analysis on magnetic field and experimental results of MCPMLM demonstrates that the force between the coil and the PM increases by more than 40%. The simulation frequency is close to 350 Hz at -3 dB, and the response time is 0.005 s. In addition, the experiment frequency reaches 300 Hz at -3 dB and the response time is 0.004 s, which agrees well with the simulation results. It means that the developed MCPMLM enjoys advantages in high frequency and rapid response, and ca...

基于永磁直线电机(PMLM)的龙门式运动平台广泛应用于芯片封装领域,但由于两PMLM间存在横梁机械耦合,因此较难实现系统的快速响应和精准同步。以龙门运动平台为研究对象,设计三环闭合控制回路后,提出一种基于模糊前馈的控制策略,同时辅以交叉耦合同步控制器,实现系统的快速同步性能。对传统PID同步控制和基于模糊前馈的同步控制算法进行对比分析,仿真结果表明:模糊前馈控制阶跃响应的上升时间为48.5 ms,比传统PID控制缩短了65%;交叉耦合同步算法在保证定位精度的同时,使得系统具有良好的同步跟随性能和较强的抗干扰能力,基本满足芯片封装高速高精度的要求。